Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6755150 | Multi-core transformer plasma source | Canfeng Lai, Peter Loewenhardt, Tsutomu Tanaka, Shamouil Shamouilian | 2004-06-29 |
| 6712020 | Toroidal plasma source for plasma processing | Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane, Peter Loewenhardt +2 more | 2004-03-30 |
| 6693050 | Gapfill process using a combination of spin-on-glass deposition and chemical vapor deposition techniques | Zhenjiang Cui, Rick J. Roberts, Jun Zhao | 2004-02-17 |