Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824748 | Heated catalytic treatment of an effluent gas from a substrate fabrication process | Tony Kaushal, Harshad Borgaonkar, Kwok Manus Wong, Michael G. Chafin, Ashish Bhatnagar | 2004-11-30 |
| 6755150 | Multi-core transformer plasma source | Canfeng Lai, Michael S. Cox, Peter Loewenhardt, Tsutomu Tanaka | 2004-06-29 |
| 6730175 | Ceramic substrate support | Joseph Yudovsky, Salvador P. Umotoy, Ron Rose, Rita Dukes, Xiaoxiong Yuan | 2004-05-04 |
| 6726804 | RF power delivery for plasma processing using modulated power signal | Liang Wang, Kwok Manus Wong, Kartik Ramaswamy | 2004-04-27 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |
| 6712020 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane +2 more | 2004-03-30 |
| 6689252 | Abatement of hazardous gases in effluent | Tony Kaushal | 2004-02-10 |
| 6682627 | Process chamber having a corrosion-resistant wall and method | Jennifer Y. Sun, Ananda H. Kumar | 2004-01-27 |
| 6673323 | Treatment of hazardous gases in effluent | Ashish Bhatnagar, Tony Kaushal, Kwok Manus Wong | 2004-01-06 |