Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797189 | Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Michael R. Rice, Chunshi Cui | 2004-09-28 |
| 6790311 | Plasma reactor having RF power applicator and a dual-purpose window | Michael R. Rice, Farahmand Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2004-09-14 |
| 6736931 | Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor | Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Craig A. Roderick | 2004-05-18 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more | 2004-04-13 |