Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797189 | Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon | Hoiman Hung, Joseph P. Caulfield, Hongqing Shan, Michael R. Rice, Kenneth S. Collins | 2004-09-28 |