Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800213 | Precision dielectric etch using hexafluorobutadiene | Ji Ding, Hidehiro Kojiri, Yoshio Ishikawa, Keiji Horioka, Ruiping Wang +1 more | 2004-10-05 |
| 6797189 | Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon | Joseph P. Caulfield, Hongqing Shan, Michael R. Rice, Kenneth S. Collins, Chunshi Cui | 2004-09-28 |
| 6762127 | Etch process for dielectric materials comprising oxidized organo silane materials | Yves Pierre Boiteux, Hui Chen, Ivano Gregoratto, Chang-Lin Hsieh, Sum-Yee Betty Tang | 2004-07-13 |