Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800213 | Precision dielectric etch using hexafluorobutadiene | Hidehiro Kojiri, Yoshio Ishikawa, Keiji Horioka, Ruiping Wang, Robert Wu +1 more | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800213 | Precision dielectric etch using hexafluorobutadiene | Hidehiro Kojiri, Yoshio Ishikawa, Keiji Horioka, Ruiping Wang, Robert Wu +1 more | 2004-10-05 |