Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790311 | Plasma reactor having RF power applicator and a dual-purpose window | Kenneth S. Collins, Michael R. Rice, Farahmand Askarinam, Douglas A. Buchberger, Jr. | 2004-09-14 |
| 6736931 | Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr. | 2004-05-18 |