Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790311 | Plasma reactor having RF power applicator and a dual-purpose window | Kenneth S. Collins, Michael R. Rice, Farahmand Askarinam, Craig A. Roderick | 2004-09-14 |
| 6736931 | Inductively coupled RF plasma reactor and plasma chamber enclosure structure therefor | Kenneth S. Collins, Michael R. Rice, John Trow, Craig A. Roderick | 2004-05-18 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2004-01-13 |