Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790311 | Plasma reactor having RF power applicator and a dual-purpose window | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick | 2004-09-14 |
| 6759624 | Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber | Ananda H. Kumar, Tetsuya Ishikawa, Kwok Manus Wong | 2004-07-06 |