Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833052 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Fred C. Redeker, Alan W. Collins | 2004-12-21 |
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Alan W. Collins, Feng Gao, Padmanaban Krishnaraj, Yaxin Wang | 2004-11-09 |
| 6776875 | Semiconductor substrate support assembly having lobed o-rings therein | Rudolf Gujer, Thomas Cho | 2004-08-17 |
| 6768878 | Image forming method and image forming apparatus utilizing a control patch | Toru Komatsu, Hirotaka Kabashima, Toru Yamaguchi | 2004-07-27 |
| 6759624 | Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber | Ananda H. Kumar, Kwok Manus Wong, Farahmand Askarinam | 2004-07-06 |
| 6734115 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Kuo-Wei Liu +5 more | 2004-05-11 |
| 6722761 | Inkjet recording head and inkjet recording device | Shinya Asano, Yukuo Yamaguchi | 2004-04-20 |
| 6709218 | Robot blade for semiconductor processing equipment | Frederik W. Freerks, Timothy Wang, Jeffrey C. Hudgens, James R. Ciulik, Mohsen Salek +2 more | 2004-03-23 |