Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776875 | Semiconductor substrate support assembly having lobed o-rings therein | Thomas Cho, Tetsuya Ishikawa | 2004-08-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776875 | Semiconductor substrate support assembly having lobed o-rings therein | Thomas Cho, Tetsuya Ishikawa | 2004-08-17 |