Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Alan W. Collins, Feng Gao, Tetsuya Ishikawa, Yaxin Wang | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Alan W. Collins, Feng Gao, Tetsuya Ishikawa, Yaxin Wang | 2004-11-09 |