Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833052 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Yaxin Wang, Fred C. Redeker, Tetsuya Ishikawa | 2004-12-21 |
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Feng Gao, Tetsuya Ishikawa, Padmanaban Krishnaraj, Yaxin Wang | 2004-11-09 |
| 6715496 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan | 2004-04-06 |