Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833052 | Deposition chamber and method for depositing low dielectric constant films | Shijian Li, Fred C. Redeker, Tetsuya Ishikawa, Alan W. Collins | 2004-12-21 |
| 6814814 | Cleaning residues from surfaces in a chamber by sputtering sacrificial substrates | Alan W. Collins, Feng Gao, Tetsuya Ishikawa, Padmanaban Krishnaraj | 2004-11-09 |