Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Bruno Geoffrion +1 more | 2004-11-02 |
| 6715496 | Method and apparatus for cleaning a semiconductor wafer processing system | Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan | 2004-04-06 |