Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776873 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Jennifer Y. Sun, Shun Wu, Senh Thach, Robert Wu, Hong Wang +2 more | 2004-08-17 |
| 6759624 | Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber | Tetsuya Ishikawa, Kwok Manus Wong, Farahmand Askarinam | 2004-07-06 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |
| 6709749 | Method for the reduction of lateral shrinkage in multilayer circuit boards on a substrate | Barry Jay Thaler, Ashok N. Prabhu | 2004-03-23 |
| 6682627 | Process chamber having a corrosion-resistant wall and method | Shamouil Shamouilian, Jennifer Y. Sun | 2004-01-27 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao +3 more | 2004-01-13 |