Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776873 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Jennifer Y. Sun, Shun Wu, Senh Thach, Ananda H. Kumar, Robert Wu +2 more | 2004-08-17 |
| 6713188 | Clean aluminum alloy for semiconductor processing equipment | Shun Wu, Clifford Stow, Yixing Lin, Brian T. West | 2004-03-30 |