Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776873 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Shun Wu, Senh Thach, Ananda H. Kumar, Robert Wu, Hong Wang +2 more | 2004-08-17 |
| 6722937 | Sealing of flat-panel device | Paul N. Ludwig, Theodore S. Fahlen, Shinji Kanagawa | 2004-04-20 |
| 6682627 | Process chamber having a corrosion-resistant wall and method | Shamouil Shamouilian, Ananda H. Kumar | 2004-01-27 |