Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Arnold Kholodenko, Alex Veytser, Wing Cheng | 2004-09-21 |
| 6776873 | Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers | Jennifer Y. Sun, Shun Wu, Ananda H. Kumar, Robert Wu, Hong Wang +2 more | 2004-08-17 |
| 6736668 | High temperature electrical connector | Arnold Kholodenko, Wing Cheng, Alvin Lau, Dennis S. Grimard | 2004-05-18 |