Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Arnold Kholodenko, Alex Veytser, Senh Thach, Wing Cheng | 2004-09-21 |
| 6736668 | High temperature electrical connector | Arnold Kholodenko, Senh Thach, Wing Cheng, Alvin Lau | 2004-05-18 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |