Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Arnold Kholodenko, Senh Thach, Wing Cheng | 2004-09-21 |