Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Arnold Kholodenko, Alex Veytser, Senh Thach | 2004-09-21 |
| 6736668 | High temperature electrical connector | Arnold Kholodenko, Senh Thach, Alvin Lau, Dennis S. Grimard | 2004-05-18 |
| 6676760 | Process chamber having multiple gas distributors and method | Arnold Kholodenko, Dan Katz | 2004-01-13 |