Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6676760 | Process chamber having multiple gas distributors and method | Arnold Kholodenko, Wing Cheng | 2004-01-13 |
| 6677712 | Gas distribution plate electrode for a plasma receptor | Douglas A. Buchberger, Jr., Yan Ye, Robert B. Hagen, Xiaoye Zhao, Ananda H. Kumar +3 more | 2004-01-13 |