Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828241 | Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source | Peter I. Porshnev | 2004-12-07 |
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Alex Veytser, Senh Thach, Wing Cheng | 2004-09-21 |
| 6736668 | High temperature electrical connector | Senh Thach, Wing Cheng, Alvin Lau, Dennis S. Grimard | 2004-05-18 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |
| 6689418 | Apparatus for wafer rinse and clean and edge etching | Donald Olgado, Avi Tepman, Yeuk-Fai Edwin Mok | 2004-02-10 |
| 6676760 | Process chamber having multiple gas distributors and method | Dan Katz, Wing Cheng | 2004-01-13 |