Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828241 | Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source | Arnold Kholodenko | 2004-12-07 |
PP
Peter I. Porshnev
Overall (2004): #138,428 of 270,089Top 55%
1
Patents 2004