Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824612 | Electroless plating system | Joseph Stevens, Dmitry Lubomirsky, Ian Pancham, Howard Grunes, Yeuk-Fai Edwin Mok +1 more | 2004-11-30 |
| 6802947 | Apparatus and method for electro chemical plating using backside electrical contacts | Michael Anthony Wood, Dmitry Lubomirsky | 2004-10-12 |
| 6770565 | System for planarizing metal conductive layers | Avi Tepman, Dmitry Lubomirsky, Timothy Webb | 2004-08-03 |
| 6736408 | Rotary vacuum-chuck with venturi formed at base of rotating shaft | Bernardo Donoso, Alexander Lerner | 2004-05-18 |
| 6720263 | Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection | Joseph Stevens, Alexander Lerner | 2004-04-13 |
| 6689418 | Apparatus for wafer rinse and clean and edge etching | Avi Tepman, Yeuk-Fai Edwin Mok, Arnold Kholodenko | 2004-02-10 |