Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824612 | Electroless plating system | Dmitry Lubomirsky, Ian Pancham, Donald Olgado, Howard Grunes, Yeuk-Fai Edwin Mok +1 more | 2004-11-30 |
| 6742279 | Apparatus and method for rinsing substrates | Dmitry Lubomirsky | 2004-06-01 |
| 6720263 | Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection | Donald Olgado, Alexander Lerner | 2004-04-13 |