Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6736408 | Rotary vacuum-chuck with venturi formed at base of rotating shaft | Donald Olgado, Bernardo Donoso | 2004-05-18 |
| 6728989 | Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber | John M. White, Shou-Sang Chang, Michael Sugarman | 2004-05-04 |
| 6725869 | Protective barrier for cleaning chamber | John M. White | 2004-04-27 |
| 6720263 | Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection | Donald Olgado, Joseph Stevens | 2004-04-13 |