Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820298 | Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint | John M. White, Ying Yu | 2004-11-23 |
| 6797074 | Wafer edge cleaning method and apparatus | Fred C. Redeker, Brian J. Brown | 2004-09-28 |
| 6728989 | Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber | Alexander Lerner, John M. White, Shou-Sang Chang | 2004-05-04 |