Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783639 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes +2 more | 2004-08-31 |
| 6777352 | Variable flow deposition apparatus and method in semiconductor substrate processing | Lawrence Chung-Lai Lei | 2004-08-17 |
| 6770565 | System for planarizing metal conductive layers | Donald Olgado, Dmitry Lubomirsky, Timothy Webb | 2004-08-03 |
| 6722834 | Robot blade with dual offset wafer supports | — | 2004-04-20 |
| 6689418 | Apparatus for wafer rinse and clean and edge etching | Donald Olgado, Yeuk-Fai Edwin Mok, Arnold Kholodenko | 2004-02-10 |