Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787006 | Operating a magnetron sputter reactor in two modes | Praburam Gopalraja, Jianming Fu, Fusen Chen, Girish Dixit, Wei Wang +1 more | 2004-09-07 |
| 6783639 | Coils for generating a plasma and for sputtering | Jaim Nulman, Sergio Edelstein, Mani Subramani, Howard Grunes, Avi Tepman +2 more | 2004-08-31 |
| 6758947 | Damage-free sculptured coating deposition | Tony P. Chiang, Gongda Yao, Peijun Ding, Fusen Chen, Barry Chin +2 more | 2004-07-06 |
| 6692617 | Sustained self-sputtering reactor having an increased density plasma | Jianming Fu, Peijun Ding | 2004-02-17 |
| 6672864 | Method and apparatus for processing substrates in a system having high and low pressure areas | Hougong Wang, Kenny King-Tai Ngan | 2004-01-06 |