Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787006 | Operating a magnetron sputter reactor in two modes | Praburam Gopalraja, Jianming Fu, Fusen Chen, Girish Dixit, Zheng Xu +1 more | 2004-09-07 |
| 6758949 | Magnetically confined metal plasma sputter source with magnetic control of ion and neutral densities | Praburam Gopalraja, Jianming Fu | 2004-07-06 |
| 6743342 | Sputtering target with a partially enclosed vault | — | 2004-06-01 |
| 6730196 | Auxiliary electromagnets in a magnetron sputter reactor | Praburam Gopalraja, Jianming Fu | 2004-05-04 |
| 6709553 | Multiple-step sputter deposition | Praburam Gopalraja, Jianming Fu | 2004-03-23 |