Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827815 | Showerhead assembly for a processing chamber | Mark Hytros, Truc T. Tran, Hongbee Teoh, Avgerinos V. Gelatos, Salvador P. Umotoy | 2004-12-07 |
| 6793766 | Apparatus having platforms positioned for precise centering of semiconductor wafers during processing | Eric W. Schieve | 2004-09-21 |
| 6777352 | Variable flow deposition apparatus and method in semiconductor substrate processing | Avi Tepman | 2004-08-17 |
| 6729824 | Dual robot processing system | Moris Kori | 2004-05-04 |
| 6718126 | Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition | — | 2004-04-06 |