Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827815 | Showerhead assembly for a processing chamber | Truc T. Tran, Hongbee Teoh, Lawrence Chung-Lai Lei, Avgerinos V. Gelatos, Salvador P. Umotoy | 2004-12-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827815 | Showerhead assembly for a processing chamber | Truc T. Tran, Hongbee Teoh, Lawrence Chung-Lai Lei, Avgerinos V. Gelatos, Salvador P. Umotoy | 2004-12-07 |