Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827815 | Showerhead assembly for a processing chamber | Mark Hytros, Truc T. Tran, Hongbee Teoh, Lawrence Chung-Lai Lei, Avgerinos V. Gelatos | 2004-12-07 |
| 6767176 | Lift pin actuating mechanism for semiconductor processing chamber | Joseph Yudovsky | 2004-07-27 |
| 6730175 | Ceramic substrate support | Joseph Yudovsky, Shamouil Shamouilian, Ron Rose, Rita Dukes, Xiaoxiong Yuan | 2004-05-04 |