Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821563 | Gas distribution system for cyclical layer deposition | — | 2004-11-23 |
| 6818094 | Reciprocating gas valve for pulsing a gas | — | 2004-11-16 |
| 6767176 | Lift pin actuating mechanism for semiconductor processing chamber | Salvador P. Umotoy | 2004-07-27 |
| 6730175 | Ceramic substrate support | Salvador P. Umotoy, Shamouil Shamouilian, Ron Rose, Rita Dukes, Xiaoxiong Yuan | 2004-05-04 |