Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824748 | Heated catalytic treatment of an effluent gas from a substrate fabrication process | Tony Kaushal, Shamouil Shamouilian, Harshad Borgaonkar, Michael G. Chafin, Ashish Bhatnagar | 2004-11-30 |
| 6759624 | Method and apparatus for heating a semiconductor wafer plasma reactor vacuum chamber | Ananda H. Kumar, Tetsuya Ishikawa, Farahmand Askarinam | 2004-07-06 |
| 6726804 | RF power delivery for plasma processing using modulated power signal | Liang Wang, Shamouil Shamouilian, Kartik Ramaswamy | 2004-04-27 |
| 6673323 | Treatment of hazardous gases in effluent | Ashish Bhatnagar, Tony Kaushal, Shamouil Shamouilian | 2004-01-06 |