Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824748 | Heated catalytic treatment of an effluent gas from a substrate fabrication process | Shamouil Shamouilian, Harshad Borgaonkar, Kwok Manus Wong, Michael G. Chafin, Ashish Bhatnagar | 2004-11-30 |
| 6789498 | Elements having erosion resistance | Chuong Q. Dam, Daniel Ashkin | 2004-09-14 |
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2004-09-14 |
| 6709314 | Chemical mechanical polishing endpoinat detection | Chuong Q. Dam, Yongqi Hu | 2004-03-23 |
| 6689252 | Abatement of hazardous gases in effluent | Shamouil Shamouilian | 2004-02-10 |
| 6673323 | Treatment of hazardous gases in effluent | Ashish Bhatnagar, Kwok Manus Wong, Shamouil Shamouilian | 2004-01-06 |