Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805952 | Low contamination plasma chamber components and methods for making the same | Christopher C. Chang | 2004-10-19 |
| 6770852 | Critical dimension variation compensation across a wafer by means of local wafer temperature control | — | 2004-08-03 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |