Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822185 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Michael Welch, Paul Luscher, Siamak Salimian, Rolf Guenther, Zhong Qiang Hua +1 more | 2004-11-23 |
| 6755150 | Multi-core transformer plasma source | Canfeng Lai, Michael S. Cox, Tsutomu Tanaka, Shamouil Shamouilian | 2004-06-29 |
| 6744212 | Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions | Andreas Fischer, Dave Trussell, Bill Kennedy | 2004-06-01 |
| 6712020 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane +2 more | 2004-03-30 |
| 6673199 | Shaping a plasma with a magnetic field to control etch rate uniformity | John M. Yamartino, Dmitry Lubomirsky, Saravjeet Singh | 2004-01-06 |