Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673199 | Shaping a plasma with a magnetic field to control etch rate uniformity | Peter Loewenhardt, Dmitry Lubomirsky, Saravjeet Singh | 2004-01-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673199 | Shaping a plasma with a magnetic field to control etch rate uniformity | Peter Loewenhardt, Dmitry Lubomirsky, Saravjeet Singh | 2004-01-06 |