Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830950 | Integrated method for release and passivation of MEMS structures | Jeffrey D. Chinn, Michael Rattner, James A. Cooper, Toi Yue Becky Leung | 2004-12-14 |
| 6822185 | Temperature controlled dome-coil system for high power inductively coupled plasma systems | Michael Welch, Paul Luscher, Siamak Salimian, Zhong Qiang Hua, Son M. Phi +1 more | 2004-11-23 |