Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830950 | Integrated method for release and passivation of MEMS structures | Rolf Guenther, Michael Rattner, James A. Cooper, Toi Yue Becky Leung | 2004-12-14 |
| 6824813 | Substrate monitoring method and apparatus | Thorsten Lill, Michael N. Grimbergen, Jitske Trevor, Wei-Nan Jiang | 2004-11-30 |
| 6802933 | Apparatus for performing self cleaning method of forming deep trenches in silicon substrates | Anisul Khan, Ajay Kumar, Dragan Podlesnik | 2004-10-12 |
| 6797188 | Self-cleaning process for etching silicon-containing material | Meihua Shen, Wei-Nan Jiang, Oranna Yauw | 2004-09-28 |
| 6699356 | Method and apparatus for chemical-mechanical jet etching of semiconductor structures | Robert Z. Bachrach | 2004-03-02 |
| 6699399 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Arthur Y. Chen, Gerald Yin +5 more | 2004-03-02 |