Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824813 | Substrate monitoring method and apparatus | Thorsten Lill, Michael N. Grimbergen, Jitske Trevor, Jeffrey D. Chinn | 2004-11-30 |
| 6797188 | Self-cleaning process for etching silicon-containing material | Meihua Shen, Oranna Yauw, Jeffrey D. Chinn | 2004-09-28 |