Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827869 | Method of micromachining a multi-part cavity | Dragan Podlesnik, Jeff Chinn, Shaoher X. Pan, Anisul Khan, Maocheng Li +1 more | 2004-12-07 |
| 6824813 | Substrate monitoring method and apparatus | Michael N. Grimbergen, Jitske Trevor, Wei-Nan Jiang, Jeffrey D. Chinn | 2004-11-30 |