Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835275 | Reducing deposition of process residues on a surface in a chamber | Xue-Yu Qian | 2004-12-28 |
| 6824813 | Substrate monitoring method and apparatus | Thorsten Lill, Jitske Trevor, Wei-Nan Jiang, Jeffrey D. Chinn | 2004-11-30 |
| 6712927 | Chamber having process monitoring window | Xue-Yu Qian | 2004-03-30 |