Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835275 | Reducing deposition of process residues on a surface in a chamber | Michael N. Grimbergen | 2004-12-28 |
| 6712927 | Chamber having process monitoring window | Michael N. Grimbergen | 2004-03-30 |
| 6699399 | Self-cleaning etch process | Zhi-Wen Sun, Weinan Jiang, Arthur Y. Chen, Gerald Yin, Ming-Hsun Yang +5 more | 2004-03-02 |