Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793835 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Claes Bjorkman, Brian Sy-Yuan Shieh | 2004-09-21 |
| 6699399 | Self-cleaning etch process | Xue-Yu Qian, Zhi-Wen Sun, Weinan Jiang, Arthur Y. Chen, Ming-Hsun Yang +5 more | 2004-03-02 |