Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833161 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Shulin Wang, Ulrich Kroemer, Aihua Chen, Ming Li | 2004-12-21 |
| 6802906 | Emissivity-change-free pumping plate kit in a single wafer chamber | Xiaoliang Jin, Shulin Wang, Henry Ho, Steven Chen | 2004-10-12 |
| 6793835 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Claes Bjorkman, Brian Sy-Yuan Shieh, Gerald Yin | 2004-09-21 |
| 6726955 | Method of controlling the crystal structure of polycrystalline silicon | Shulin Wang, Steven Chen, Errol Antonio C. Sanchez | 2004-04-27 |
| 6713127 | Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD | Janardhanan Anand Subramony, Yoshitaka Yokota, Ramaseshan Iyer, Aihua Chen | 2004-03-30 |