Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833161 | Cyclical deposition of tungsten nitride for metal oxide gate electrode | Ulrich Kroemer, Lee Luo, Aihua Chen, Ming Li | 2004-12-21 |
| 6802906 | Emissivity-change-free pumping plate kit in a single wafer chamber | Xiaoliang Jin, Lee Luo, Henry Ho, Steven Chen | 2004-10-12 |
| 6726955 | Method of controlling the crystal structure of polycrystalline silicon | Steven Chen, Lee Luo, Errol Antonio C. Sanchez | 2004-04-27 |